G03000 - SEMI G30 - Test Method for Junction-to-Case Thermal Resistance Measurements of Ceramic Packages StdDcs-Withdrawn a front side dielectric antireflective

a front side dielectric antireflective layer and front side contacts on top

본 가이드는 F-GHG DRE의 저감 설비(abatement tool) 사양에 적용된다

throughput bottlenecks

This Test Method uses a spectrum analyzer

G03000 - SEMI G30 - Test Method for Junction-to-Case Thermal Resistance Measurements of Ceramic Packages StdDcs-Withdrawn a front side dielectric antireflectiveThis Standard was technically approved by the global Assembly & Packaging Technical Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published in 1986; previously published in 1988. NOTICE: This Document was reapproved with minor editorial changes. The purpose of this test is to determine the thermal