E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded including:

including:

Support for optional attributes

6  This Guide also provides a measurement procedure for local bow

This Guide describes the various analytical procedures for standards verification procedures required to meet a specific liquid chemical specification

E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded including:The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor