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SEMI PV88-1018 (Reapproved 0124)
specifications
such as the bulk lifetime
but the resistivity is suitable for less-stringent applications
E17700 - SEMI E177 - Specification for Transmission Electron Microscope (TEM) Lamella Carriers Used in Electron Microscopy Workflows StdPbc-0626 SEMI PV88-1018 (Reapproved 0124)1 Purpose 1. 1 Transmission electron microscopes (TEM) are widely used in semiconductor industry for process control, defect analysis and technology development support as the dimensions and details of the features to be investigated are well below the resolution of light microscopes and often also of scanning electron microscopes (SEM). 1. 2 To enable inspection of the interesting parts of wafers or devices with TEM, small and thin samplescalled
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